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Solar

High-speed off-line Laser-assisted Selective Diffusion Equipment

The research and development project of double-track laser-assisted selective diffusion (SE) for fully automatic solar cells adopts imported lasers, high-speed galvanometer systems, multi-group CCD vision systems and existing turntable technology to improve the performance of the cells, and ensure the same entry and exit of the cells, without affect of the whole line CT after being assembled on the line.

Equipment Parameters

01

With 4 stations of high-speed DD turntable coordinate processing to improve CT of the whole line, and the flatness of table top of turntable 4 is within 30um, which provides guarantee for the stability of the process

02

High-speed galvanometer scanning, the galvanometer scanning speed is ≥60m/s, the precision can reach ±15um, and the digital control mode is adopted, which greatly improves the laser marking efficiency

03

Compatibility of process graphics (lines, segments and points)

04

The spot size (window opening size) can be adjusted from 90 to 130 um, and can be selected as round or square

05

The laser wavelength is 532nm, the power is ≥25-60W (optional), the power stability is ≤2%RMS, the rate adjustment range is 50-500 KHz, and the pulse width is 3-50ns

06

Two-track independent control, two lasers and four lasers can be selected to achieve higher productivity

Equipment Pictures

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